Choose from a large range of sources- Thermal Evaporation, E Guns, Wire Feeder, Barrel Source, Effusion Cells, Sputter, PIAD, Etch, Heating and Glow Discharge
Quartz Monitoring: Single, 6 and 12-way quartz with increased sampling rates for termination accuracy in single and co-deposition processes.
Custom tooling solutions, designed to maximize batch capacity for evaporation processes without compromise on film quality
DLC Coating: Evatec brings conventional PVD and PECVD processes together in the BAK evaporator to enable high performance protected AR coatings on Si or Ge.
Single and multiple bandpass filters for laser, 3D and photonics applications
Front and Back Metals in Power Devices: Evatec's planetary handling and flip systems offer cost effective deposition of thick front side aluminium or rear side contact stacks in single or double sided processes on the BAK Evaporator.