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Cryogenic Vacuum Pump

Cryogenic Vacuum Pump


Certification CE Certified
Application Industrial
Condition New
Automatic Grade Semi Automatic
Power 1-3kw
Pressure High Pressure
Driven Electric


  • Pump range is available in nominal sizes from DN100 to DN1250
  • HSR design reduces cool-down times
  • Higher cooling power, Higher capacity and superior performance on second stage
  • Optimized design enables operation in process temperatures up to 3500◦C and high gas loads in the same time
  • Low vibration cooling system
  • Closed-circuit operation (No need for continuous gas supply)
  • Patented geometry ensures outstanding up-times and short regeneration times
  • Highest manufacturing quality



HSR Cryo-pumps are high vacuum pumps, renowned for providing clean and outstanding vacuum in a very reliable manner. They find extensive use in:

  • Thin-film coating systems
  • Space Simulation chambers
  • Sputter equipment
  • Fusion test systems
  • Particle accelerators
  • Thermal coating systems
  • Metallizing equipment

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